AC-TEM
AC-TEM software is special use to curvey templet measuring evaluation, it can measure and evaluate templete point by point according rule of theory curvey and calculate its templet contour level error, output data and graph reports. Integrated evaluating and measuring flow embeded simple measuring procedure which can help user to avoid trouble of programme.
AC-TEM software supports contact and non-contact two measuring methods and divides shape error and position error according best matching evaluation method
AC-TEM software supports contact and non-contact two measuring methods and divides shape error and position error according best matching evaluation method